Direct Fabrication of a Copper RTD over a Ceramic-Coated Stainless-Steel Tube by Combination of Magnetron Sputtering and Sol–Gel Techniques
dc.contributor.author | Bikarregi Iglesias, Aitor | |
dc.contributor.author | Domínguez Meister, Santiago | |
dc.contributor.author | Brizuela, Marta | |
dc.contributor.author | López, Alejandra | |
dc.contributor.author | Suárez Vega, Ana | |
dc.contributor.author | Agustín Sáenz, Cecilia | |
dc.contributor.author | Presa, Micael | |
dc.contributor.author | López, Gabriel Alejandro ![]() | |
dc.date.accessioned | 2023-09-12T16:24:56Z | |
dc.date.available | 2023-09-12T16:24:56Z | |
dc.date.issued | 2023-06-08 | |
dc.identifier.citation | Sensors 23(12) : (2023) // Article ID 5442 | es_ES |
dc.identifier.issn | 1424-8220 | |
dc.identifier.uri | http://hdl.handle.net/10810/62450 | |
dc.description.abstract | Reducing the economic and environmental impact of industrial process may be achieved by the smartisation of different components. In this work, tube smartisation is presented via direct fabrication of a copper (Cu)-based resistive temperature detector (RTD) on their outer surfaces. The testing was carried out between room temperature and 250 °C. For this purpose, copper depositions were studied using mid-frequency (MF) and high-power impulse magnetron sputtering (HiPIMS). Stainless steel tubes with an outside inert ceramic coating were used after giving them a shot blasting treatment. The Cu deposition was performed at around 425 °C to improve adhesion as well as the electrical properties of the sensor. To generate the pattern of the Cu RTD, a photolithography process was carried out. The RTD was then protected from external degradation by a silicon oxide film deposited over it by means of two different techniques: sol–gel dipping technique and reactive magnetron sputtering. For the electrical characterisation of the sensor, an ad hoc test bench was used, based on the internal heating and the external temperature measurement with a thermographic camera. The results confirm the linearity (R2 > 0.999) and repeatability in the electrical properties of the copper RTD (confidence interval < 0.0005). | es_ES |
dc.description.sponsorship | This work was carried out within the framework of the Smart Oil & Gas project (project No. ZE-2019/00025) and was funded by the HAZITEK business R & D support aid program, action co-financed by the Basque government and the European Union through the European Regional Development Fund 2014–2020 (ERDF). Additionally, the project has obtained financing from the Basque Government: Project No. IT-1714-22. | es_ES |
dc.language.iso | eng | es_ES |
dc.publisher | MDPI | es_ES |
dc.rights | info:eu-repo/semantics/openAccess | es_ES |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/es/ | |
dc.subject | thin film | es_ES |
dc.subject | RTD | es_ES |
dc.subject | copper sensor | es_ES |
dc.subject | magnetron sputtering | es_ES |
dc.subject | sol–gel | es_ES |
dc.subject | tube | es_ES |
dc.title | Direct Fabrication of a Copper RTD over a Ceramic-Coated Stainless-Steel Tube by Combination of Magnetron Sputtering and Sol–Gel Techniques | es_ES |
dc.type | info:eu-repo/semantics/article | es_ES |
dc.date.updated | 2023-06-27T13:22:08Z | |
dc.rights.holder | © 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/ 4.0/). | es_ES |
dc.relation.publisherversion | https://www.mdpi.com/1424-8220/23/12/5442 | es_ES |
dc.identifier.doi | 10.3390/s23125442 | |
dc.departamentoes | Física | |
dc.departamentoeu | Fisika |
Files in this item
This item appears in the following Collection(s)
Except where otherwise noted, this item's license is described as © 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/ 4.0/).