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A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities
(MDPI, 2014-06)
In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on ...
Interface electronics for an RF resonance-based displacement sensor
(IOP Publishing LTD, 2013)
We propose, design, and test an electronic interface for a new standalone, affordable and compact displacement transducer based on resonant cavities. The operation of the interface establishes a self-resonance in the ...