Dynamic Model of a Compliant 3PRS Parallel Mechanism for Micromilling

Abstract

The objective of this work is to develop a manipulator of 5 degrees of freedom for micromilling. It consists of a XY stage under a 3PRS compliant parallel mechanism, obtaining the advantages of the compliant joints as are higher repetitiveness, smoother motion and a higher bandwidth, due to the high precision demanded from the process, under 0.1 μm. In this work, the dynamics of the compliant stage will be developed. The modelling approach is based on the use of the Principle of Energy Equivalence combined with the Boltzmann-Hamel equations to analyze the rotational dynamics of the platform. A pseudo-rigid model has been assumed for the compliant joints, calculating the flexural and torsional stiffness by FEA. Finally, a prototype has been built and some preliminary results are shown comparing the simulation and the measurements.